亚洲 欧洲 综合 另类小说

解決方案

案例展示

  • 汽車制造
    • 脫脂液過濾
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    • 循環水過濾
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    • 面漆過濾
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    • 熱水洗過濾
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    • 汽車涂裝過濾應用
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  • 食品飲料
    • 壓縮氣過濾
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    • 罐頂呼吸過濾
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    • CIP清洗過濾
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    • 洗瓶水過濾
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    • 發酵過濾
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    • 水過濾
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  • 化工產業
    • 樹脂過濾
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    • 人造合成纖維
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    • 聚碳酸酯生產過濾
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    • 過氧化氫過濾
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    • 聚氨酯生產進程
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    • 尼龍生產
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    • 乙二醇生產
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    • 乙烯生產
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    • 聚丙烯生產
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  • 水處理
    • 飲用水過濾
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    • 鍋爐補給水處理
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    • 凝結水凈化
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    • 冷卻水回用
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  • 石油開采與煉化
    • 天然氣脫水
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    • 胺液過濾
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    • 進口氣體分離
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    • 潤滑油過濾
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    • 產成水過濾
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    • 完井液過濾
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    • 注井水過濾
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  • 電子工業
    • 超純水處理
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    • 超純氣體處理
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    • 晶圓研磨與切割廢水回
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    • 微電子空氣過濾
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    • 半導體制造廢水
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    • 液晶清洗
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  • 工程案例
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晶圓硅片研磨/切割廢水回用

2019-06-15
0次
晶圓硅片研磨/切割廢水回用
詳細介紹:

過程簡述
  制造半導體前,必須將硅轉換為晶圓片,晶圓生產包括:晶棒成長、晶棒裁切與檢測、外徑研磨、切片、圓邊、表層研磨、蝕刻、去疵、拋光、清洗及檢驗包裝工序;研磨過程之后需采用大量的超純水來洗凈晶圓表面所殘留的懸浮微顆?;蚪饘匐x子污染物,因而產生CMP研磨廢液及后段清洗廢水。
  問題描述
  廢水處理不當或直接排放會污染環境
  處理水不加以回收造成水資源浪費
  傳統處理方式有局限(占地大,加藥多,污泥產生量多,水質不穩定)
  產品應用
  上層清液溢流至中間水箱,經中間水泵將清水增壓后進一步的過濾,經過10微米的袋式過濾器、1微米的濾芯式過濾器、活性炭吸附裝置及終端0.2微米的精密過濾器,之后進入末端水箱,經末端送水泵將系統完全處理的回用水送至超濾產水箱,可直接進反滲透裝置以繼續生產超純水;上述過程亦可采用陶瓷膜微濾裝置對上清液作過濾濃縮處理。
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亚洲 欧洲 综合 另类小说